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News

In this area you can find the latest news from micro resist technology. We always keep you up to date on new research projects, conferences, and we regularly publish our tech blog.

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EM-Resist2025-05
Join the mrt webinar series and meet the experts
micro resist technology offers a free online seminar series „mrt webinar – meet the experts“ on a monthly base.
6. May 2025
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+++ Company Announcement +++
micro resist technology GmbH becomes part of the TOK Group for joint expansion into European semiconductor manufacturing and related markets
5. May 2025
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14th edition of NILindustrialday 2025
The 14th edition of NILIndustrial Day 2025 is fast approaching - an unmissable event for industry professionals and enthusiasts! We hope you've marked May 5 and 6 in your calendar. The NIL Industry Day is designed to complement the academic and science-oriented conferences.
24. January 2025
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Nano-Micro-Lithography Symposium 2025
We are pleased to welcome you once again to this year's edition of NMLS on March 12-13 2025 – NMLS brings together technical experts, customers, and users from Heidelberg Instruments, Nanoscribe, micro resist technology and GenISys. The symposium will be held as an in-person event at the TU Eindhoven in the Netherlands.
23. January 2025
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Workshop Advanced Optics Production
We are looking forward to the next highlight at the beginning of March. The OptecBB association is organizing a workshop on advanced optics production. Representatives of the participating companies will talk about new trends, challenges and applications.
15. January 2025
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Display Innovation Day on December 11th, 2024
Among many other exciting contributions, our expert Dr. Maria Russew will give a presentation on “Highly reliable hybrid polymer materials for micro-optical applications, photonics and beyond”
3. December 2024
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Workshop "Beams & More" in Stuttgart
Our expert Dr. Alexander Plucinski will be there with his presentation on “Innovative Photopolymers Advancing Micro- and Nano Patterning for Photonic Applications”
31. October 2024
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Semicon Europa 2024, November 12 - 15
We would like to welcome you - customers and partners - again at SEMICON Europa hall C2, booth 746
10. October 2024
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PolyChrome Workshop – Berlin Adlershof – Curie-Cabinet – October 9th, 2024
We will contribute to this workshop with an expert presentation by Dr. Maria Russew about “Hybrid Polymers for Optical Applications and Beyond”.
25. September 2024
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MNE 2024 - September 16th - 19th, 2024
MRT will be attending MNE again this year - the 50th edition of the International Micro and Nano Engineering Conference from September 16th – 19th, 2024 in Montpellier, France
11. September 2024
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Technical Workshop - Montpellier - September 16th, 2024
In the run-up to the MNE conference in Montpellier, the Technical Workshop on Laser Lithography & Direct Write is taking place - organized by Heidelberg Instruments, GenISys, and micro resist technology.
10. September 2024
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NanoKorea 2024 – July 3rd – 5th, 2024
We are proud to announce that we will be attending NanoKorea at KINTEX Exhibition Center I in the first week of July.
22. June 2024
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NNT (2024) NIL ID – Save-the-date
This year, 2024, we will join forces and merge the NNT 2024, the 23rd International Conference on Nanoimprint and Nanoprint Technologies, and the European NIL Industrial Day 2024, the 14th summit focusing on industrial applications of Nanoimprint Lithography, to be held as a united conference on June 24-27, 2024, at ”The Medicon Village” in Lund, Sweden.
21. June 2024
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BioChip in Berlin
We will be presenting at BioChip in Berlin this year. Look forward with us to Dr. Maria Russew contribution. She will be speaking about one of our important research projects on Wednesday, May 29 at 14:25 p.m. on the topic: "PolyChrome – Photonics for sensing applications".
28. May 2024
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SPIE Advanced Lithography + Patterning February 25th – 29th 2024
We would like to proudly inform you that we will be at the SPIE-AL in San Jose California again this year. You are welcome to meet our experts in the technical exhibition at booth #538.
13. February 2024
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Visit from the Berlin Senator for Economic Affairs
Franziska Giffey - Berlin's Senator for Economic Affairs - visited us on January 8, 2024 as part of the "Made in Berlin" tour of the year 2024...
11. January 2024
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Semicon Europa 2023, November 14 - 17
We look forward to welcoming you - customers and partners - again at the SEMICON in Munich ...
11. October 2023
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Workshop PolyChrome Berlin
We are pleased to announce our participation in the workshop PolyChrome Berlin on November 2nd
11. October 2023
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Nano-Micro-Lithography Symposium
Nano-Micro-Lithography Symposium Save the date: November 6th/7th, 2023
11. October 2023
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NNT 2023, October 9 – 11
We are looking forward to our participation in the NNT 2023 conference and exhibition. Taking place in Boston (USA) from October 9th – 11th...
4. October 2023
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MNE - Micro and Nano Engineering Conference 25. - 28.09.2023 in Berlin Germany
We are pleased to inform you that we - micro resist technology GmbH - are the local conference organizers of this year’s MNE 2023 ...
14. June 2023
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Workshop Maskless Laser Lithography for the Advanced Micro- and Nanofabrication
Workshop Maskless Laser Lithography for the Advanced Micro- and Nanofabrication...
14. June 2023
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26th World’s Leading Trade Fair with Congress for Photonics Components, Systems and Applications June 27–30, 2023 | Messe München
We would like to announce that this year we will also be exhibiting at Laser World of Photonics in Munich.
14. June 2023
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NIL industrialday 2023
Leading NIL experts will once again meet at the 2023 NIL Industrial Day...
26. February 2023
Konferenz
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SPIE Advanced Lithography + Patterning 26 February - 2 March 2023
We are very pleased that we will resume our international trade fair trips in 2023!
25. February 2023
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micro resist technology -30 years, a success story
The 17th of February 2023 was a special day for micro resist technology GmbH...
25. February 2023
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SEMICON EUROPA, 15 - 18 November 2022 Munich, Germany
We are very pleased to be able to welcome you to our booth again this year...
7. October 2022
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NMLS22
NMLS Nano-Micro-Lithography Symposium, October 19th/20th, 2022
Joint Symposium on Direct Write, Optical, Ion and Electron Beam Lithography
7. October 2022
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Workshop - Maskless Laser Lithography for Advanced Micro- and Nanofabrication, September 19
We especially invite you to the talk of our expert Dr. Arne Schleunitz on “Cross-functional photoresists and photopolymers enhancing micro- and nanofabrication”...
31. August 2022
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MRT is Gold Sponsor @ MNE 2022
We proudly announce our Gold Sponsorship for the MNE 2022, the 48th International Conference on Micro and Nano Engineering focusing on innovations in micro- and nano-fabrication as well as applications of the fabricated micro/nanostructures, devices and microsystems.
31. August 2022
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Please meet us at the Optonet Workshop, September 14-15
“Ultra Precision Manufacturing of Aspheres and Freeforms”...
31. August 2022
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PhotonicsFinland
Optics and Photonics Days from September 6th - 8th in Tampere (Finland).
Proudly we would like to inform you that we will be at the Optics and Photonics Days...
31. August 2022
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We are sponsor at the Swiss ePrint in Buchs (Switzerland)! September 5 – 6, 2022
There you will have the opportunity to meet and talk with our experts at the booth...
31. August 2022
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micro resist technology GmbH (mrt), is now officially one of the best employers in Germany.
micro resist technology GmbH (mrt), is now officially one of the best employers in Germany. Based on a scientifically substantiated employee and management survey, the Center for Employer Attractiveness (zeag GmbH) annually awards the "Top Job" seal to the most attractive employers in the German SME sector. We impressed with a good level of employee feedback in the category "Leadership & Vision“.
14. July 2022
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Graphene 2022, July 5 – 8
We are pleased to announce our participation at Graphene 2022 in Aachen. Our experts will also be there for you online.
27. June 2022
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NIL Industrialday June 14th – 15th 2022 - The leading Conference for Nanoimprint Lithography and its Applications
We are happy to announce that the next NILIndustrial Day 2022 will take place on June 14th – 15th 2022 as a fully remote summit...
9. June 2022
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May 09, 2022 - Technical Workshop (in-person) on Maskless Laser Lithography and NanoFrazor® Patterning for Advanced 2D and 3D Biomedical Devices
Heidelberg Instruments and micro resist technology GmbH are jointly organizing this technical workshop focusing on systems and applications in biomedical technology...
12. April 2022
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May 05, 2022 - IVAM High-Tech Summit 2022 - Solutions for Sustainability
We will participate in this year’s IVAM High-Tech Summit as business partner...
12. April 2022
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Managing Director Gabi Grützner was awarded the Federal Cross of Merit
On February 17th, 2022, our founder and managing director Mrs. Gabi Grützner received the Federal Cross of Merit with ribbon from Stephan Schwarz, Senator for Economics, Energy and Enterprises in Berlin.
21. February 2022
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White Paper: Advancing greyscale lithography and pattern transfer of 2.5D structures using maP 1200G resist series
In our second White Paper we focus on greyscale lithography...
19. January 2022
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SEMICON EUROPA, 16 - 19 November 2021 Munich, Germany
We are at the SEMICON EUROPA in Munich! ...
12. October 2021
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NMLS Nano-Micro-Lithography Symposium, November 4h, 2021
Join us for the Symposium, hosted on gather.town. ...
12. October 2021
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NNT 2021, the 20th International Conference on Nanoimprint and Nanoprint Technologies (16.-17.11.2021)
We are happy to present our recent R&D activities virtually on the upcoming 20th International Conference on Nanoimprint and Nanoprint Technologies...
12. October 2021
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MNC21_
MNC 2021, October 26-29, Online and On-demand, 34th International Microprocesses and Nanotechnology Conference
We are more than happy to present our recent R&D activities again far abroad in Japan ...
27. September 2021
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PhotonicDays21
Workshop on PolyChrome Technology Platform: Photonics for Sensing – October 5th, 2021
We gladly announce our participation in the upcoming Photonics Days Berlin Brandenburg ...
27. September 2021
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MNE21
MNE Micro and Nano Engineering Conference - Turin, Italy - September 20th - 23rd, 2021
The MNE is back this year and we will be again part of it! Visit us at our virtual booth in the expo area to learn about new material developments and new releases...
19. August 2021
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Workshop on Maskless Laser Lithography & Direct Writing for Nano- and Microfabrication - September 20 th, 2021
We are pleased that the series of events “Maskless Laser Lithography and Direct Writing for Nano- and Microfabrication” will be continued within the framework of the MNE conference...
19. August 2021
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NMLS Nano-Micro-Lithography Symposium, June 30th, 2021
At this point we would like to draw your attention to the next edition of the “Nano-Micro-Lithography Symposium“ ...
16. June 2021
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virtual NIL INDUSTRIAL DAY 2021
We completed our preparations for this year’s virtual NIL INDUSTRIAL DAY 2021 and are now looking forward to an unique selection of exciting presentations.
16. June 2021
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White Paper: Cyclic Olefin Copolymer (COC) Formulation for the Fabrication of Sub-Micron Thin Films
We are very happy to announce the start of our new white paper series...
27. May 2021
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EIPBN Electron, Ion, and Photon Beam Technology and Nanofabrication
We are pleased to announce our participation in the virtual EIPBN conference on...
23. April 2021
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Micro Patterned Micro Titer Plates
Special issue “Nanoimprint Lithography Technology and Applications”
We are pleased to announce that our work on a “novel concept of Micro Patterned Micro Titer Plates Fabricated via UV-NIL for...
28. March 2021
conference
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EPIC’s Online Technology Meeting on Moulded Optics
We will participate in EPIC’s Online Technology Meeting on Moulded Optics on Monday, 3 May 2021
12. March 2021
conference
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Online Symposium “Functional Coatings, Manufacturing, Metrology & Application”
We are pleased to announce our participation in the online symposium “Functional Coatings, Manufacturing, Metrology & Application” organized by the TH Wildau on the 9th of March.
25. February 2021
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NNCI Advanced Lithography UnSymposium @ Stanford University
We proudly announce our participation with two presentations in the virtual, interactive online event organized by our partners Raith and Heidelberg Instruments...
14. January 2021
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Virtual Exhibition and Conference PHOTONICS+
Committed to develop the most efficient and effective photonics virtual exhibition and conference, our partner EPIC – European Photonics Industry consortium – is organizing...
20. December 2020
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Important information
Dear customers, partners and friends, An unprecedented year is coming to an end!
4. December 2020
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Interview on the EU project NextGenMicrofluidics
We are very pleased about our contribution in the current cluster newsletter for optical technologies and microsystem technology...
3. December 2020
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Online Symposium on Direct Write, Optical, Ion and Electron Beam Lithography
We would like to announce proudly the next event of the “Symposium on Direct Write, Optical, Ion and Electron Beam Lithography”...
2. December 2020
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3D Printing of Optical Components
3D Printing of Optical Components
In a contribution to the book "3D Printing of Optical Components" we review the chemistry of our hybrid polymers as well as...
26. November 2020
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Joining EU’s Graphene Flagship Initiative
We are very happy to become part of the largest research initiatives funded by the European Commission...
18. October 2020
HoliFAB_MRT_News
Digital HoliFAB conference
As partner of the project consortium we would like to announce HoliFAB’s first digital conference taking place on Nov 5th 2020...
18. October 2020
Information
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Current information on COVID-19
During the global pandemic of COVID-19, we at micro resist technology GmbH make our necessary contribution to the mandatory...
16. August 2020
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Partnership with DJ MicroLaminates
micro resist technology GmbH and DJ MicroLaminates reaffirm their longstanding partnership...
14. July 2020
Tech-Blog
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Fabrication of phase-gradient meta-surfaces consisting of high AR ma-N 2400 patterns
Electron beam lithography using highly sensitive negative tone ma-N 2400 resist in combination with critical...
14. July 2020
Tech-Blog
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Functional Materials for Inkjet-printing
micro resist technology offers functional materials for Inkjet-printing. The materials have been specially designed to...
30. June 2020
Tech-Blog
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Manufacturing Microlens Arrays by Reflow and UV Moulding
A cost-efficient method for the manufacturing of micro lens arrays is the reflow of patterned positive...
23. June 2020
Tech-Blog
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Core and Clad Systems fo Optical Waveguides
micro resist technology provides various materials for the fabrication of optical waveguides...
23. June 2020
Tech-Blog
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Optical 3D patterning by greyscale lithography and UV moulding
An excellent method for the manufacturing of optical 3D structures is grayscale patterning of positive resist ma-P 1200G...
23. June 2020
Tech-Blog
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Product-supporting Lithographic Services
We offer lithographic services and application engineering to support our customers finding tailored process solutions...
18. June 2020
Tech-Blog
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3D optical micro structures via two-photon polymerization (2PP)
The two-photon polymerization is an excellent method for the manufacturing of individually designed (optical)...
18. June 2020
Tech-Blog
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Fabrication of 3D patterns by means of Two-Photon-Polymerization
Two-photon-polymerization (2PP) is a cost-efficient method to fabricate individually shaped 3D patterns...
18. June 2020
Tech-Blog
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Homogeneous resist coating of substrates with topography
Spray coating is a material-saving method for the homogeneous resist coating of substrates, especially...
18. June 2020
Tech-Blog
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Fabrication of sub-µm-patterns by Deep UV lithography using ma-N 2400
Deep UV exposure using highly sensitive negative tone ma-N 2400 resists is a method for the generation of sub-µm patterns...
18. June 2020
Publications
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Grayscale positive photoresist
Grayscale lithography creates 3D film profiles with gradually varying thickness1, see Fig.1. The grayscale...
11. May 2020
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SPIE Advanced Lithography
We are pleased to announce our participation in the SPIE Advanced Lithography 2020 in San Jose, California...
13. March 2020
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Symposium on Nanolithography
Symposium on Nanolithography ~ 18./19.02.2020 in Stuttgart - As in the last years we would like to invite you...
13. March 2020
conference
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SPIE Photonics West 2020
We are pleased to announce our participation in the SPIE Photonics West 2020 in San Francisco, California 01-06 February.
13. March 2020
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SEMICON EUROPA 2019
In November from 12th to 15th the Semicon Europe Exhibition will take place in Munich, Germany...
13. March 2020
Resist Alliance
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MicroChem Corp. (MCC) changed its name
In September 2019 the 45th International Conference on Micro & Nano Engineering will be held in Rhodes Greece...
13. March 2020
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TRANSDUCERS 2019 in Berlin - Germany
Proudly we announce our participation at TRANSDUCERS 2019 – EUROSENSORS XXXIII in Berlin
13. March 2020
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ENRIS • Enschede NL
The European Nanofabrication Research Infrastructure Symposium (ENRIS) 2019 is the 2nd edition of the...
13. March 2020
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osa2019
OSA - Optical Design and Fabrication Congress
We are pleased to announce our participation in the 2019 Optical Design and Fabrication Congress, to be held at OSA Headquarters...
13. March 2020
conference
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20th CMi Annual Review Meeting
We are pleased to announce our participation in the 20th CMi Annual Review Meeting on Tuesday May 7th, 2019 at the EPFL in Lausanne...
13. March 2020
conference
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ElectronTechExpo, Moscow
We are pleased to announce our participation in the 17th International exhibition of technologies, equipment and materials for electronic and...
13. March 2020
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NILindustrialday, Aachen
In March 2019, micro resist technology will be co-hosting the 9th edition of the NIL Industrial Day symposium with its partner AMO and...
13. March 2020
conference
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CHEMNITZER SEMINAR
In March 2019 the Chemnitzer Seminar Elektronenstrahlithographie: Materialien – Prozesse – Anwendungen...
13. March 2020
conference
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Symposium Nanolithography
In March 2019 the 2nd European Symposium on Direct Write, Optical, Ion and Electron beam Lithography will be held in IST Austria...
13. March 2020
conference
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SPIE Photonics West 2019
We are pleased to announce our participation in the SPIE Photonics West Exhibition 2019 in San Francisco (USA), 5-7 February 2019.
13. March 2020
Tech-Blog
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Product-supporting Lithographic Services
We offer lithographic services and application engineering to....
13. March 2020
Tech-Blog
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Optical 3D patterning by greyscale lithography and UV moulding
An excellent method for the manufacturing of optical 3D...
19. March 1900
Element 32
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Resist Alliance

micro resist technology is a single entry point for specialty chemicals used in micro and nano manufacturing in Europe. The portfolio of in-house products is complemented by the strategic sales of associated products that are manufactured by our international partners. Here we act as a high-service distributor and offer European medium-sized companies a wide range of complementary products from a single source, which can be used for both established and innovative production and manufacturing processes.

DuPont Electronic Solutions (formerly DOW Electronic Materials / Rohm and Haas Europe Trading ApS)

We offer products for semiconductor technologies, advanced packaging and dry film resists from our partner DuPont, with whom we have been working for more than 20 years.

Kayaku Advanced Materials, Inc. (formerly MicroChem Corp.)

We offer photoresists and specialty chemicals for MEMS and microelectronic applications from our partner Kayaku Advanced Materials, with whom we have been working for more than 20 years.

DJ MicroLaminates, Inc.

We offer dry film resists for MEMS, microfluidics and packaging applications from our partner DJ MicroLaminates, with whom we have been cooperating for over two years.

Dry Films

Dry films are ready-to-use polymer films as laminate foil with a high accuracy of the film thickness and excellent adhesion behaviour on various substrates. They are very simple in handling, photo-structurable and both as cut sheets and as roll material available.

  • Available in different film thicknesses
  • UV-crosslinking as negative photoresist
  • Feasibility of high aspect ratios
  • Vertical sidewalls
  • Multi lamination possible – up to 6 layer  complex multi-layer designs
  • High chemical resilience

 

  • Application as permanent material for optical application (e.g. lenses, wave guides …), in micro fluidics

Functional materials for inkjet-printing

Special designed functional materials from the product groups Hybrid Polymers, Photoresists, and Nanoimprint Polymers for the deposition and alternative patterning using inkjet printing process

  • Available in different viscosities (adjustable)
  • Suitable in commercial inkjet printing devices
  • Focused on high reliability of droplet generation
  • UV-curable formulations

 

  • Usable as a permanent material for optical application (e.g. lenses, wave guides, optical couplers, diffractive elements, …)
  • Packaging material in the micro electronic
  • Deposition / patterning on substrates with surface topography
  • Imprint material for nano-structuring with high dose accuracy

Nanoimprint Resists

Nanoimprint Lithography (NIL) is a straight forward, low cost, and high throughput capable technology for the fabrication of nanometer scaled patterns. Main application fields are photonics, next generation electronics, as well as bio- and sensor applications.

micro resist technology GmbH has provided tailor-made resist formulations for nanoimprint lithography (NIL) since 1999. The unique key features of our products are outstanding film forming and imprinting performance beside excellent pattern fidelity and plasma etch stability. Besides our highly innovative material developments in close contact to industrial needs, our strength is the ability to adjust our materials in film thickness as well as addressing certain needs of the specific use cases within the formulation. Our nanoimprint resists are mostly applied as an etch mask for pattern transfer into various substrates, like Si, SiO2, Al or sapphire.

Our portfolio covers materials for the classical thermal NIL (T-NIL), in which a thermoplastic polymer is used, as well as UV-NIL, in which a liquid formulation is photo crosslinked upon photo exposure. With our technological expertise and know-how we are able to find the right material for your process and applications. Please contact us for your technical support!

Hybrid Polymers

micro resist technology offers a broad portfolio of UV-curable hybrid polymer products for micro-optical applications. Their excellent optical transparency and high thermal stability makes them perfectly suitable for the production of polymer-based optical components and waveguides. The main fields of application are micro lenses, diffractive optical elements (DOE), gratings, and single-mode or multi-mode waveguides.

OrmoComp®: DE 30 210 075 433; IR 1 091 982 ; TW 100030626; OrmoClear®: DE 30 210 075 434; IR 1 091 359 ; TW 100030628; OrmoStamp®: DE 30 210 075 435; IR 1 092 621 ; TW 100030629; OrmoPrime®: DE 30 210 075 436

Positive Photoresists

Positive Photoresists for UV lithography (mask aligner, laser, greyscale exposure) and e-beam lithography

  • Variety of viscosities for 0.1 µm – 60 µm film thickness in one spin-coating step
  • Effective for broadband, g-line, h-line or i-line exposure, laser direct writing at 350…450 nm and e-beam lithography
  • No post exposure bake
  • Easy removal
     
  • For pattern transfer: Etch mask, mould for electroplating, mould for UV moulding
  • Use in microsystems technology, microelectronics, micro-optics – manufacture of e.g. MEMS, LEDs, ICs, MOEMS, fiber optics telecommunications devices, flat panel displays

Negative Photoresists

Photoresists for UV (mask aligner, laser)/ DUV and e-beam lithography

  • Effective for broadband and i-line, Deep UV, e-beam exposure, or laser direct writing @ 405 nm
  • Lift-off resists with tunable pattern profile, high temperature stability up to 160 °C
  • Variety of viscosities for different film thicknesses in one spin-coating step
     
  • For pattern transfer: Physical vapour deposition (PVD) and single  layer lift-off, etch mask, mould for electroplating
  • For permanent applications: Polymeric waveguides
  • Use in microsystems technology, microelectronics, micro-optics  – manufacture of e.g. LEDs, ICs, MEMS, flat panel displays, fiber optics telecommunications devices