• Mrt2
  • Mrt3

micro resist technology develops, produces and supplies materials for microelectronic devices, semiconductor devices and MEMS products

MicroChem Corp. (MCC) changed its name

Our partner MicroChem Corp. has formally changed its name to Kayaku Advanced Materials, Inc. ...

Negative Photoresists

Our negative photoresists are used for UV-, DUV, e-beam and X-ray lithography as well as for laser direct writing ...

Positive Photoresists

Our positive photoresists are used in processes such as UV (mask aligner, laser direct writing, greyscale exposure) and e-beam lithography …

Nanoimprint Resists

Our tailor-made resist formulations are used in different technologies of nanoimprint lithography (NIL) …

Hybrid Polymers

Our UV-curable hybrid polymers are used for the manufacture of polymer-based micro- and nano-optics …

Other Products

As distributor for DOW Electronic Materials (USA), MicroChem Corp. (USA), and DuPont (USA) we complement our portfolio for Europe ...


We provide a new selection of UV-curable liquid silicone rubber / UV-PDMS (OEM:Shin-Etsu) used in replication technologies for European markets …


SEMICON EUROPA 2019 • 12 - 15 November 2019
In November from 12th to 15th the Semicon Europe Exhibition will take place in Munich, Germany...
MicroChem Corp. (MCC) changed its name
In September 2019 the 45th International Conference on Micro & Nano Engineering will be held in Rhodes Greece (September 23 – 26, 2019)...
TRANSDUCERS 2019 • 23 - 27 June, Berlin - Germany
Proudly we announce our participation at TRANSDUCERS 2019 – EUROSENSORS XXXIII in Berlin
ENRIS • 17 - 18 June 2019, Enschede NL
The European Nanofabrication Research Infrastructure Symposium (ENRIS) 2019...
OSA - Optical Design and Fabrication Congress • 10 - 12. June, USA
We are pleased to announce our participation in the 2019 Optical Design and Fabrication Congress, to be held at OSA Headquarters in Washington, DC from 10-12 June 2019...
20th CMi Annual Review Meeting, Tuesday May 7th, 2019
We are pleased to announce our participation in the 20th CMi Annual Review Meeting on Tuesday May 7th, 2019 at the EPFL in Lausanne, Switzerland.
ElectronTechExpo 15-17 April 2019, Moscow
We are pleased to announce our participation in the 17th International exhibition of technologies, equipment and materials for electronic and electrical industries 2019 in Moscow (RU), 15-17 April ...
NILindustrialday • 28 - 29 March 2019, Aachen
In March 2019, micro resist technology will be co-hosting the 9th edition of the NIL Industrial Day symposium with its partner AMO and PROFACTOR in Germany, Aachen (March 28-29, 2019).
CHEMNITZER SEMINAR • 13 March 2019...
Symposium Nanolithography • 13 March 2019
Symposium Nanolithography • 13 March 2019...
Mitarbeiter/ Mitarbeiterin/ All Gender im Verkaufsinnendienst, Fachbereich Versand
Zur Verstärkung unseres Teams suchen wir einen Sachbearbeiter für den weltweiten Export unserer Produkte (m/w/all Gender), in Teil-/Vollzeit...
SPIE Photonics West • 05 - 07 February 2019
We are pleased to announce our participation in the SPIE Photonics West Exhibition 2019 in San Francisco (USA), 5-7 February 2019.


micro resist technology GmbH

micro resist technology GmbH

Köpenicker Str. 325

12555 Berlin




Anfahrtsbeschreibung Innovationspark

+49 30 64 16 70 100
+49 30 64 16 70 200