Greyscale patterning of positive resists of the ma-P 1200G series is an excellent method for the manufacturing of 3D structures.
These photoresist structures are used as template for subsequent pattern transfer, e.g. by
- Metallization and electroplating
- UV moulding with OrmoStamp® and OrmoComp® or thermal moulding with PDMS
- Dry etching
The video shows how to perform greyscale lithography in thick films in a simple set-up using ma-P 1275G.
Applications
Fabrication of 3D microstructures, e.g. in
- MEMS and MOEMS,
- microfluidics,
- wafer-level optics,
- displays
Links to related product pages