Spray coating is a material-saving method for the homogeneous resist coating of substrates, especially
of substrates having a topography, or of bulky, partly heavy substrates.
Process
a) Resist coating on planar substrates
⇒ Use of conventional positive or negative tone resists with a viscosity suitable for spray-coating
b) Resist coating on substrates having a topography or on bulky, partly heavy substrates
⇒ Use of solvent-modified resists, such as ma-N Spray 1400_XP
→ Resist patterning and pattern transfer
Application
Fabrication of metal patterns by dry or wet etching, electroplating or lift-off process on 3D substrate surfaces
Links to related product pages
ma-N 1400
(ma-P 1200, ma-N 400)