Viscosity [Pa∙s] |
2.9 ± 0.3 |
30 ± 3 |
Film thichness upon spin coating [µm]
3000 rpm
6000 – 1000 rpm
|
30
20 – 95 |
100
50 - 270 |
Spectral sensitivity photo-curing [nm] |
300 – 410 |
300 – 410 |
Recommended exposure dose [mJ/cm²] |
1000 – 3000 |
1000 – 3000 |
Volume shrinkage [%] |
3 - 5 |
<< 2 |
Refractive index (cured, 589 nm) |
1.555 |
1.561 |
Abbe number |
34 |
34 |
CTE (20-150 °C) [ppm/K] |
150 |
160 |
dn/dT [10-4/K] |
-2.1 |
-2.3 |
Young‘s modulus [GPa] |
~1.2 |
~0.8 |
Hardness
by indentation [MPa]
Shore D |
~60
80 |
~90
>80 |
Thermal stability |
Up to 270 °C (short term) |
Up to 270 °C (short term) |
Replication with PDMS molds
(no oxygen sensitivity) |
No |
No |
Resolution |
Down to 100 nm feature sizes |
Down to 100 nm feature sizes |
Shelf-life |
6 months |
6 months |
Solvent-free |
Yes, ready-to-use solutions |
Yes, ready-to-use solutions |