Schicktdicke [µm] @ 3000 rpm |
0,2 |
0,5 |
1,5 |
2,0 |
4,1 |
7,5 |
dyn. Viskosität [mPas]
(@ 25 °C, 1000 s-1) |
2,0 |
3,8 |
14 |
23 |
70 |
290 |
Prebake |
95 - 100°C |
Spektrale Empfindlichkeit |
300 - 380nm
i-line - 365 nm |
Belichtungsdosis @ 365 nm
UV Mercury Lamp/ Breitband
UV-LED, Stepper, Laser |
350 – 1.900 mJ/cm2 |
Entwickler |
ma-D 331/S (NaOH based)
ma-D 530/S (TMAH based) |
ma-D 331/S (NaOH based)
ma-D 531/S (TMAH based) |
ma-D 332/S (NaOH based)
ma-D 532/S (TMAH based) |
Entferner |
mr-Rem 700 (NMP & NEP free)
mr-Rem 500 (NMP free)
ma-R 404/S (strongly alkaline) |
Lift-off |
mr-Rem 700 (NMP & NEP free)
mr-Rem 500 (NMP free) |