Thermal nanoimprint resist for the fabrication of high-aspect-ratio patterns
M Messerschmidt et al., Microelectronic Engineering Volume 98, October 2012, Pages 107-111
Link: https://doi.org/10.1016/j.mee.2012.07.098
Diamond like carbon nanocomposites with embedded metallic nanoparticles
S Tamulevičius et al., 2018 Rep. Prog. Phys. 81 024501
Link: https://doi.org/10.1088/1361-6633/aa966f