Polymeric working stamps are gaining more and more attention in nanoimprint lithography and other replication techniques. On the one hand, polymeric working stamps spare the valuable stamp original (or master) being directly used during processing. On the other hand, they enable high throughput processes, since they can be easily copied multiple times. Suitable polymeric materials for the fabrication of working stamps enable high pattern fidelity and a defect free replication. Furthermore, a long working stamp longevity allows a high number of repeated imprints or replications per working stamp.