3D microstructures

Thermal reflow

UV lithography

Greyscale lithography

Laser direct writing lithography

Leuchtdioden (LED)

mr-I 9000M series
mr-NIL 6000E series
ma-N 400 & ma-N 1400 series
UV-curable liquid silicone rubber / UV-PDMS

Semiconductor components

ma-N 2400 & mr-EBL 6000 series
mr-I 9000M series
mr-NIL 6000E series
mr-UVCur21 series
ma-N 400 & ma-N 1400 series

Dry etching and DRIE (etch mask for semiconductors and metals)

Electroplating templates

High-aspect ratio patterning

Two-photon absorption lithography

Nano- und Mikroelektronik

ma-N 2400 & mr-EBL 6000 series
mr-I 9000M series
mr-NIL 6000E series
mr-UVCur21 series
UV-curable liquid silicone rubber / UV-PDMS

Wire-grid polarizers

Deep-UV lithography

ma-N 2400 & mr-EBL 6000 series

Electron-beam lithography

ma-N 2400 & mr-EBL 6000 series

Optische Wellenleiter

EpoCore & EpoClad Serien
OrmoCore and OrmoClad

Diffraktive optische Elemente (DOE)

Organische Elektronik

Nanoimprint lithography (thermal) for pattern transfer

Physical vapour deposition (PVD)

mr-I 9000M series
mr-NIL 6000E series
mr-UVCur21 series
ma-N 400 & ma-N 1400 series

Patterned sapphire substrates (PSS)

Lab-on-a-Chip

OrmoClear® Series
UV-curable liquid silicone rubber / UV-PDMS

Mikrofluidik und Mikro-Bio-Fluidik

OrmoClear® Series
UV-curable liquid silicone rubber / UV-PDMS

Nanoimprint lithography (thermal) for permanent application

Nanoimprint lithography - combined thermal and UV-NIL

mr-NIL 6000E series

Nanoimprint lithography (UV- or photo-NIL) for pattern transfer

Roll-to-roll processes

Wafer-level-optics

Nanoimprint Lithographie (UV- oder Photo-NIL) für Permanentanwendung

UV molding

OrmoClear® Series
OrmoCore and OrmoClad
UV-curable liquid silicone rubber / UV-PDMS

Inkjet-printing

Nanoimprint working stamp

UV-curable liquid silicone rubber / UV-PDMS

Lift-off patterning

ma-N 400 & ma-N 1400 series