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+49 30 641 670 100
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info@microresist.de
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Company philosophy

micro resist technology GmbH is a leading company for the development and production of innovative photoresists, special polymers as well as ancillaries for micro- and nanolithography and micro-optical applications. Our products are applied in key technologies like microsystems technologies, microelectronics, micro and nano photonics micro and nano engineering as well as in Life Sciences.

Since the company foundation in 1993, we produce as a medium sized chemical enterprise highly specialized materials at our site in Berlin. Serving the global high-tech markets our products enable processes like UV, Laser, X-ray, and e-beam lithography, nanoimprint lithography as well as associated patterning technologies. We are committed to advance our product portfolio by continuously innovating new products as well as preparing tailored solutions for our customer’s technological demands in highest quality. Since 1997 we are certified after DIN EN ISO 9001 (Quality Management System) and since 2011 after DIN EN ISO 14001  (Environment Management System).

Our worldwide customers are innovative manufacturing companies whose value creation is significantly based on micro and nano fabrication. Furthermore, leading research institutes and top level universities are our clients which we support already in the early phase of their technology development. All our customers appreciate our expertise for photoresists, polymers, photo polymers as well as our comprehensive technological consultations with a holistically view on the lithographic interaction between material and processes. It is our aim to have satisfied and enthusiastic customers who are successful with their individual processes. As a reliable and experienced partner we also offer product-supporting lithographic services.

Our portfolio of in-house manufactured products is complemented by a strategic distributorship of associated products from supplementary international manufacturers*. We operate as a high service distributor to the European small and medium sized businesses and offer a wide range of materials from one source which can be used for conventional technologies as well as for advanced processes in micro and nano patterning.

* DOW Electronic Materials, MicroChem Corp., DuPont, DJ Microlaminates

Managing Director

Dipl. Chem. Gabi Grützner

Managing Partner
g.gruetzner@microresist.de

Dr. Ing. Arne Schleunitz

Managing Director
a.schleunitz@microresist.de

Head of

Ines Decker

Head of Finance & Controlling
i.decker@microresist.de

Dr. Anja Voigt

Business Unit Manager Photoresists, Product Manager Negative Photoresists
a.voigt@microresist.de

Dr. Marko Vogler

Product Manager Polymers
m.vogler@microresist.de

Dr. Manuel Thesen

Product Manager NIL Polymers
m.thesen@microresist.de

Dr. Jan Jasper Klein

Product Manager Hybrid Polymers
j.klein@microresist.de

Dr. Sylvia Herrndorf

Head of Quality, Environment & Project Management
s.herrndorf@microresist.de

Mirjam Henschel

Manager Sales Department
m.henschel@microresist.de

Marina Heinrich

Head of Lithography
m.heinrich@microresist.de

Sales Team

Franziska Kopp

Sales of DOW products
f.kopp@microresist.de

Carsten Schröder

Sales of DuPont products
c.schroeder@microresist.de

Anja Hinz

Sales of mrt products und MCC products
a.hinz@microresist.de

Ines Richter

Sales of mrt products und MCC products
i.richter@microresist.de

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Resist Alliance

micro resist technology is a single entry point for specialty chemicals used in micro and nano manufacturing in Europe. The portfolio of in-house products is complemented by the strategic sales of associated products that are manufactured by our international partners. Here we act as a high-service distributor and offer European medium-sized companies a wide range of complementary products from a single source, which can be used for both established and innovative production and manufacturing processes.

DuPont Electronic Solutions (formerly DOW Electronic Materials / Rohm and Haas Europe Trading ApS)

We offer products for semiconductor technologies, advanced packaging and dry film resists from our partner DuPont, with whom we have been working for more than 20 years.

Kayaku Advanced Materials, Inc. (formerly MicroChem Corp.)

We offer photoresists and specialty chemicals for MEMS and microelectronic applications from our partner Kayaku Advanced Materials, with whom we have been working for more than 20 years.

DJ MicroLaminates, Inc.

We offer dry film resists for MEMS, microfluidics and packaging applications from our partner DJ MicroLaminates, with whom we have been cooperating for over two years.

Dry Films

Dry films are ready-to-use polymer films as laminate foil with a high accuracy of the film thickness and excellent adhesion behaviour on various substrates. They are very simple in handling, photo-structurable and both as cut sheets and as roll material available.

  • Available in different film thicknesses
  • UV-crosslinking as negative photoresist
  • Feasibility of high aspect ratios
  • Vertical sidewalls
  • Multi lamination possible – up to 6 layer  complex multi-layer designs
  • High chemical resilience

 

  • Application as permanent material for optical application (e.g. lenses, wave guides …), in micro fluidics

Functional materials for inkjet-printing

Special designed functional materials from the product groups Hybrid Polymers, Photoresists, and Nanoimprint Polymers for the deposition and alternative patterning using inkjet printing process

  • Available in different viscosities (adjustable)
  • Suitable in commercial inkjet printing devices
  • Focused on high reliability of droplet generation
  • UV-curable formulations

 

  • Usable as a permanent material for optical application (e.g. lenses, wave guides, optical couplers, diffractive elements, …)
  • Packaging material in the micro electronic
  • Deposition / patterning on substrates with surface topography
  • Imprint material for nano-structuring with high dose accuracy

Nanoimprint Resists

Nanoimprint Lithography (NIL) is a straight forward, low cost, and high throughput capable technology for the fabrication of nanometer scaled patterns. Main application fields are photonics, next generation electronics, as well as bio- and sensor applications.

micro resist technology GmbH has provided tailor-made resist formulations for nanoimprint lithography (NIL) since 1999. The unique key features of our products are outstanding film forming and imprinting performance beside excellent pattern fidelity and plasma etch stability. Besides our highly innovative material developments in close contact to industrial needs, our strength is the ability to adjust our materials in film thickness as well as addressing certain needs of the specific use cases within the formulation. Our nanoimprint resists are mostly applied as an etch mask for pattern transfer into various substrates, like Si, SiO2, Al or sapphire.

Our portfolio covers materials for the classical thermal NIL (T-NIL), in which a thermoplastic polymer is used, as well as UV-NIL, in which a liquid formulation is photo crosslinked upon photo exposure. With our technological expertise and know-how we are able to find the right material for your process and applications. Please contact us for your technical support!

Hybrid Polymers

micro resist technology offers a broad portfolio of UV-curable hybrid polymer products for micro-optical applications. Their excellent optical transparency and high thermal stability makes them perfectly suitable for the production of polymer-based optical components and waveguides. The main fields of application are micro lenses, diffractive optical elements (DOE), gratings, and single-mode or multi-mode waveguides.

OrmoComp®: DE 30 210 075 433; IR 1 091 982 ; TW 100030626; OrmoClear®: DE 30 210 075 434; IR 1 091 359 ; TW 100030628; OrmoStamp®: DE 30 210 075 435; IR 1 092 621 ; TW 100030629; OrmoPrime®: DE 30 210 075 436

Positive Photoresists

Positive Photoresists for UV lithography (mask aligner, laser, greyscale exposure) and e-beam lithography

  • Variety of viscosities for 0.1 µm – 60 µm film thickness in one spin-coating step
  • Effective for broadband, g-line, h-line or i-line exposure, laser direct writing at 350…450 nm and e-beam lithography
  • No post exposure bake
  • Easy removal
     
  • For pattern transfer: Etch mask, mould for electroplating, mould for UV moulding
  • Use in microsystems technology, microelectronics, micro-optics – manufacture of e.g. MEMS, LEDs, ICs, MOEMS, fiber optics telecommunications devices, flat panel displays

Negative Photoresists

Photoresists for UV (mask aligner, laser)/ DUV and e-beam lithography

  • Effective for broadband and i-line, Deep UV, e-beam exposure, or laser direct writing @ 405 nm
  • Lift-off resists with tunable pattern profile, high temperature stability up to 160 °C
  • Variety of viscosities for different film thicknesses in one spin-coating step
     
  • For pattern transfer: Physical vapour deposition (PVD) and single  layer lift-off, etch mask, mould for electroplating
  • For permanent applications: Polymeric waveguides
  • Use in microsystems technology, microelectronics, micro-optics  – manufacture of e.g. LEDs, ICs, MEMS, flat panel displays, fiber optics telecommunications devices