OrmoClear®FX

UV Imprint/ UV Moulding

OrmoClear®FX offers glass-like material properties after UV curing. It is optimized for micro- and nanooptical components of different pattern sizes and dimensions.

Unique Features

  • Highly transparent for near UV and VIS down to 350 nm
  • High thermal and mechanical stability

Applications

  • Moulded gratings and prisms
  • Micro lenses and micro lens arrays
  • Optical couplers and connectors
  • Microfluidic systems
  • Single elements or wafer scale
     
Parameter

OrmoClear®FX

OrmoComp®

Viscosity

1.5 +/- 0.3 Pa•s

2 ± 0.5 Pa•s

Resolution

Down to 100 nm feature sizes

Thermal stability

Up to 270 °C (short term)

Volume shrinkage

3 – 5 %

5 – 7 %

Refractive index (589 nm, cured)

1.555

1.520

Replication with PDMS molds
(no oxygen sensitivity)

Yes Yes

Shelf-life

6 months

Solvent-free

Yes, ready-to-use solutions

Our hybrid polymers are available in the following filling sizes:

  •     100 g
  •     250 g
  •     500 g
  •     1000 g

OrmoThin; OrmoPrime®08: • 100 ml • 0.25 l • 0.5 l • 1.0 l (Ancillaries)

OrmoDev: • 1.0 l • 2.5 l • 5.0 l (Ancillaries) 

UV-curable liquid silicone rubber / UV-PDMS

Working Stamp Fabrication

Distribution for european markets now

micro resist technology GmbH is providing a new selection of UV-curable liquid silicone rubber / UV-PDMS (OEM:Shin-Etsu) for European markets. The UV-PDMS can be used in a wide range of applications, but in particular for the manufacture of soft-molds in replication technologies such as nanoimprint lithography.

Main advantages by using the new Shin-Etsu UV-PDMS over generic PDMS:

  • Spin-coating for enhanced mold fabrication
  • Faster curing time (e.g. 10 min after UV exposure)
  • High resolution capabilities down 100 nm and smaller
  • 0.02% shrinkage for superb pattern fidelity
     

There are two different types of UV-PDMS available. The following table provides the general material characteristics of the two different types of UV-PDMS:

General material characteristics of the new UV-PDMS (OEM:Shin-Etsu)

 

KER-4690

(X-34-4184)

KER-4691

(X-34-4208)

Appearance
(Color Tone)

Colorless

Milky-white

Appearance
(Transparency)

Transparent

Semi-
transparent

Viscosity
[Pa・s]

2.7

110

Hardness:
Durometer
type-A

55

42

Elongation
at Break [%]

110

400

Tensile Strength
[MPa]

7.7

7.0

Tear Propagation
Strength (crescent)
[kN/m]

3.0

17.1

Linear
Contraction [%]

<0.1

<0.1

Curing Rate*
[Min]

20

45

Curing Condition
[mJ/cm2]

2000

2000

* TA Instruments ARES-G2, 25℃, 1Hz

Each system consists of two components. After thoroughly mixing the two-component material system (A/B) in equal volume, the liquid mixture compounds can be processed for up to 24 hours by casting, spin-coating or other deposition methods. Due to the photo-sensitivity, the cross-linking (or curing) is initiated by UV-exposure. In contrast to generic PDMS, this allows almost full curing already at room temperature and significantly increases the curing speed (by factor of 100 and more). Furthermore, without the need of an additional thermal curing one can achieve a minimized shrinkage of 0.02%.

 

For detailed information on material properties and process specifications, please get in contact with the product manager NIL polymers Dr. Manuel Thesen (m.thesen@microresist.de). In case of inquiry request or purchase order, please contact our sales assistant Mrs. Anja Hinz (a.hinz@microresist.de).

 

The Shin-Etsu UV-PDMS are available in the following package sizes:

50 g / 50 g (UV-PDMS KER-4690-A/B)

500 g / 500 g (UV-PDMS KER-4690-A/B and KER-4691-A/B)

OrmoStamp®

Working Stamp Fabrication

OrmoStamp® offers glass-like properties after UV curing and was designed for the fabrication of transparent polymer working stamps with excellent pattern fidelity

Unique Features

  • Highly transparent for near UV and visible light
  • High thermal and mechanical stability
  • Enhanced anti-adhesive properties for low release forces
  • Processing with standard lithography equipment

Applications

  • Transparent working stamp fabrication
  • Cost efficient alternative to quartz stamps
  • UV-based and thermal imprinting, nanoimprint lithography
     
Parameter

OrmoStamp®

Viscosity

0.4 +/– 0.2 Pa•s

Resolution, pattern replication

Excellent pattern replication

Thermal stability

Up to 270 °C (short term)

Refractive index (589 nm, cured) 1.516
Replication with PDMS molds
(no oxygen sensitivity)
Yes

Shelf-life

6 months

Solvent-free

Yes, ready-to-use solution

Our hybrid polymers are available in the following filling sizes:

  •     100 g
  •     250 g
  •     500 g
  •     1000 g

OrmoThin; OrmoPrime®08: • 100 ml • 0.25 l • 0.5 l • 1.0 l (Ancillaries)

OrmoDev: • 1.0 l • 2.5 l • 5.0 l (Ancillaries) 

OrmoStamp®

Working Stamp Fabrication

OrmoStamp® offers glass-like properties after UV curing and was designed for the fabrication of transparent polymer working stamps with excellent pattern fidelity

Unique Features

  • Highly transparent for near UV and visible light
  • High thermal and mechanical stability
  • Enhanced anti-adhesive properties for low release forces
  • Processing with standard lithography equipment

Applications

  • Transparent working stamp fabrication
  • Cost efficient alternative to quartz stamps
  • UV-based and thermal imprinting, nanoimprint lithography
     
Parameter

OrmoStamp®

Viscosity

0.4 +/– 0.2 Pa•s

Resolution, pattern replication

Excellent pattern replication

Thermal stability

Up to 270 °C (short term)

Refractive index (589 nm, cured)

1.516

Replication with PDMS molds
(no oxygen sensitivity)

Yes

Shelf-life

6 months

Solvent-free

Yes, ready-to-use solution

Our hybrid polymers are available in the following filling sizes:

  •     100 g
  •     250 g
  •     500 g
  •     1000 g

OrmoThin; OrmoPrime®08: • 100 ml • 0.25 l • 0.5 l • 1.0 l (Ancillaries)

OrmoDev: • 1.0 l • 2.5 l • 5.0 l (Ancillaries) 

OrmoCore and OrmoClad

UV Lithography

OrmoCore and OrmoClad offer glass-like material properties after UV curing and are due to their low optcal loss particulary suitable for optical waveguide fabrication

Unique Features

  • Low optical loss at datacom wavelengths
  • Tunable refractive index (Core/Clad ratios)
  • High thermal and mechanical stability

Applications

  • Single-mode and multi-mode waveguides
  • Beam splitters
  • Thermo-optical switches
  • Microring resonators
     
 

OrmoCore

OrmoClad

Viscosity

2.9 +/- 0.4 Pa•s

2.5 +/- 1 Pa•s

Resolution

Down to 100 nm feature sizes

Down to 100 nm feature sizes

Thermal stability

Up to 270 °C (short term)

Up to 270 °C (short term)

Refractive index
(589 nm, cured)

1.555

1.537

Replication with PDMS molds
(no oxygen sensitivity)

No No

Shelf-life

6 months

6 months

Solvent-free

Yes, ready-to-use solutions

Yes, ready-to-use solutions

Our hybrid polymers are available in the following filling sizes:

  •     100 g
  •     250 g
  •     500 g
  •     1000 g

OrmoThin; OrmoPrime®08: • 100 ml • 0.25 l • 0.5 l • 1.0 l (Ancillaries)

OrmoDev: • 1.0 l • 2.5 l • 5.0 l (Ancillaries) 

OrmoClear® Series

UV Imprint/ UV Moulding

The OrmoClear® series offers glass-like material properties after UV curing and due to its very low volume shrinkage during UV exposure it is suitable for components of dimensions > 100 µm

Unique Features

  • Highly transparent for near UV and VIS down to 350 nm
  • High thermal and mechanical stability

Applications

  • Moulded gratings and prisms
  • Micro lenses and micro lens arrays
  • Optical couplers and connectors
  • Microfluidic systems
  • Single elements or wafer scale
     
Parameter OrmoClear® OrmoClear®30 OrmoClear®FX

Viscosity

2.9 ± 0.3 Pa•s

30 ± 3 Pa•s

1.5 ± 0.3 Pa•s

Resolution

Down to 100 nm feature sizes

Volume shrinkage

3 - 5 %

<< 2 %

3 - 5 %

Thermal stability

Up to 270 °C (short term)

Refractive index
(589 nm, cured)

1.555

1.561

1.555

Replication with PDMS molds
(no oxygen sensitivity)

No No Yes

Shelf-life

6 months

Solvent-free

Yes, ready-to-use solutions

Our hybrid polymers are available in the following filling sizes:

  •     100 g
  •     250 g
  •     500 g
  •     1000 g

OrmoThin; OrmoPrime®08: • 100 ml • 0.25 l • 0.5 l • 1.0 l (Ancillaries)

OrmoDev: • 1.0 l • 2.5 l • 5.0 l (Ancillaries) 

OrmoComp®

UV Imprint/ UV Moulding

OrmoComp® offers glass-like material properties after  UV curing and is the standard product for a broad range of pattern sizes and component dimensions

Unique Features

  • Highly transparent for near UV and VIS down to 350 nm
  • High thermal and mechanical stability

Applications

  • Moulded gratings and prisms
  • Micro lenses and micro lens arrays
  • Optical couplers and connectors
  • Microfluidic systems
  • Single elements or wafer scale
     
Parameter

OrmoComp®

OrmoClear®FX

Viscosity

2 ± 0.5 Pa•s

1.5 +/- 0.3 Pa•s

Resolution

Down to 100 nm feature sizes

Thermal stability

Up to 270 °C (short term)

Volume shrinkage

5 – 7 %

3 – 5 %

Refractive index (589 nm, cured)

1.520

1.555

Replication with PDMS molds
(no oxygen sensitivity)

Yes Yes

Shelf-life

6 months

Solvent-free

Yes, ready-to-use solutions

Our hybrid polymers are available in the following filling sizes:

  •     100 g
  •     250 g
  •     500 g
  •     1000 g

OrmoThin; OrmoPrime®08: • 100 ml • 0.25 l • 0.5 l • 1.0 l (Ancillaries)

OrmoDev: • 1.0 l • 2.5 l • 5.0 l (Ancillaries)