Products »
micro resist technology GmbH

Currently available products

---

Product parameter - Overview

Resist	Thickness (3000 rpm, 30 s)	Resolution	Wavelength
ma-P 1205	0.5 µm	1.0 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1210	1.0 µm	1.0 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1215	1.5 µm	1.25 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1225	2.5 µm	1.5 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1240	4.0 µm	1.75 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1275	7.5 µm	3.0 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1275	30 µm (350 rpm/60 s)	10.0 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1275 HV	11 µm	4.0 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1275 HV	30 µm (700 rpm/60 s)	10.0 µm	Broadband g-linie: 436 nm i-linie: 365 nm
ma-P 1275 HV	50 µm (400 rpm/60 s)	20.0 µm	Broadband g-linie: 436 nm i-linie: 365 nm

other thicknesses on demand

Ancilleries

Resist Series	Developer	Thinner	Remover
ma-P 1200	ma-D 331 ma-D 531*	ma-T 1050	mr-Rem 660 ma-R 404S**
ma-P 1275/ ma-P 1275 HV	ma-D 331/ ma-D 531* 2.38 % TMAH	ma-T 1050	mr-Rem 660 ma-R 404S**

* metall-ion free ** strongly alkaline

---