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micro resist technology GmbH

Currently available products

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Product parameter overview

Polymers	Thickness (3000 rpm)	Wavelength	Resolution
Anwendung als Ätzmaske für die Strukturübertragung
mr-UVCur06	-	280 – 450 nm **	50 nm
mr-UVCur21-100 nm	100 nm	280 – 450 nm **	≤ 30 nm
mr-UVCur21-200 nm	200 nm	280 – 450 nm **	≤ 30 nm
mr-UVCur21-300 nm	300 nm	280 – 450 nm **	≤ 30 nm
mr-UVCur21SF	1.6 µm	280 – 450 nm **	≤ 30 nm

Other thicknesses on demand.
** Compatible with different UV lamps and filtersystems

Ancilleries

Polymers	Thinner	Adhesion promoter
mr-UVCur06	ma-T 1070	mr-APS1
mr-UVCur21-Series	ma-T 1070	mr-APS1
mr-UVCur21SF	-	mr-APS1

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