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micro resist technology GmbH

Currently available products

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Product parameter overview

Polymers	Thickness (3000 rpm)	Wavelength	Resolution
Application as etch masks for pattern transfer
mr-I 7010R	100 nm	-	≤ 50 nm
mr-I 7020R	200 nm	-	≤ 50 nm
mr-I 7030R	300 nm	-	≤ 50 nm
mr-I 8010R	100 nm	-	≤ 50 nm
mr-I 8020R	200 nm	-	≤ 50 nm
mr-I 8030R	300 nm	-	≤ 50 nm
mr-I 7010E	100 nm	-	≤ 50 nm
mr-I 7020E	200 nm	-	≤ 50 nm
mr-I 7030E	300 nm	-	≤ 50 nm
mr-I 8010E	100 nm	-	≤ 50 nm
mr-I 8020E	200 nm	-	≤ 50 nm
mr-I 8030E	300 nm	-	≤ 50 nm
mr-NIL 6000.1	100 nm	Broadband or i-line -365 nm**	≤ 50 nm
mr-NIL 6000.2	200 nm	Broadband or i-line -365 nm**	≤ 50 nm
mr-NIL 6000.3	300 nm	Broadband or i-line -365 nm**	≤ 50 nm
mr-I 9010E	100 nm	-	≤ 50 nm
mr-I 9020E	200 nm	-	≤ 50 nm
mr-I 9030E	300 nm	-	≤ 50 nm
mr-I PMMA 35k 100nm*	100 nm	-	≤ 50 nm
mr-I PMMA 35k 300nm*	300 nm	-	≤ 50 nm
mr-I PMMA 35k 500nm*	500 nm	-	≤ 50 nm
Permanent applications
mr-I T85-0.3	300 nm	-	≤ 50 nm
mr-I T85-1.0	1 µm	-	≤ 50 nm
mr-I T85-5.0	5 µm	-	≤ 50 nm
mr-I 9030M	300 nm	-	≤ 50 nm
mr-I 9050M	500 nm	-	≤ 50 nm
mr-I 9100M	1 µm	-	≤ 50 nm

Other thicknesses on demand.
* PMMA also available 75k molecular weight
** Compatible with different UV lamps and filtersystems

Ancilleries

Polymers	Thinner
mr-I 7000R-Series	ma-T 1050
mr-I 7000E-Series	ma-T 1050
mr-I 8000R-Series	ma-T 1050
mr-I 8000E-Series	ma-T 1050
mr-NIL 6000-Series	ma-T 1045
mr-I 9000E und mr-I 9000M-Series	ma-T 1045
mr-I PMMA-Series	ma-T 1045
mr-I T 85-Series	-

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