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    Products »
    micro resist technology GmbH

     Polymers for Nanoimprint Lithography


    Polymers for thermal Nanoimprint Lithography


    Application as etch masks for pattern transfer

    » mr-I 7000E and mr-I 8000E
    Thermoplastics with different glass transition temperatures

    » mr-I 7000R and mr-I 8000R » new «
    Thermoplastics with different glass transition temperatures with strongly improved release properties

    » mr-NIL 6000
    Curing polymer for combined thermal an UV nanoimprinting

    » mr-I 9000E
    Thermoset with low imprint temperature

    » mr-I PMMA
    For fundamental nanoimprint investigations

    Permanent applications

    » mr-I T85
    Thermoplastic for lab-on-chip and bio applications

    » mr-I 9000M
    Thermoset for micro and nanofabrication with high thermal stability


    Polymers for UV-based Nanoimprint Lithography


    Application as etch masks for pattern transfer

    » mr-UVCur06 and mr-UVCur21
    UV-curable liquid polymer systems, application by spin-coating

    » mr-UVCur21SF
    Suitable for droplet dispensing


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