Products»
micro resist technology GmbH
Currently available products
...for thermal NIL
» mr-I T85
...for UV-based NIL
Details of product » mr-UVCur21 and mr-UVCur06 «
Unique features
Applications
Process flow
Examples
mr-UVCur06
800 nm squares imprinted,
1200 nm pitch,
large-area imprint
(Courtesy of Profactor, Austria)
350 nm trenches,
residual layer thickness below 10 nm
(Courtesy of Profactor, Austria)
Examples
mr-UVCur21
80 nm lines imprinted,
pattern dept 110 nm
(Courtesy of AMO)
Excellent filling of mould patterns
with demanding filling factors
100x100 µm2 squares
(Courtesy of AMO)
