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micro resist technology GmbH
Currently available products
...for thermal NIL
...for UV-based NIL
Details of product » mr-I T85«
Unique features
Applications
Process flow
Examples
mr-I T85
Complete lab-on-a-chip device for absorption-
measurements, all components
imprinted in one layer of mr-I T85
(courtesy of MIC / TU Denmark))
Microfluidic dye laser
and
Fresnel lens
imprinted
in mr-I T85
geprägt
(courtesy of MIC / TU Denmark)
Photonic wave guide,
fabricated using
mr-I T85, 320 nm deep holes transferred into
silicon
(200 nm diameter)
(courtesy of MIC / TU Denmark))
