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  • micro resist technology GmbH
  • Koepenicker Str. 325
  • 12555 Berlin
  • GERMANY
  • phone   +49 30 64 16 70 100
  • fax       +49 30 64 16 70 200
  • mail   sales@microresist.de
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    Products»
    micro resist technology GmbH

     Polymers for Nanoimprint Lithography  »mr-I PMMA«

    Currently available products

    ...for thermal NIL

    » mr-I 7000E & mr-I 8000E

    » mr-NIL 6000

    » mr-I 9000E

    » PDF › mr-I PMMA

    » mr-I T85

    » mr-I 9000M

    ...for UV-based NIL

    » mr-UVCur21 and mr-UVCur06

    Details of products   » mr-I PMMA«

    Unique features


  • Excellent film quality
  • Attainable smallest feature size at least 50 nm
    (depending on stamp resolution)
  • safe solvents
  • Various molecularly
    weights (35k, 75k)

    • Applications


  • Basic investigation
    •

    Process flow


    print version ›››    print version
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