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micro resist technology GmbH
Polymers for Nanoimprint
Lithography »mr-I 7000R & mr-I 8000R«
Currently available products
...for UV-based NIL
Details of product » mr-I 7000R & 8000R «
Unique features
Applications
Process flow
Examples
mr-I 7000R & mr-I 8000R
12 nm trenches,
50 nm pitch, imprinted in
in mr-I 7000R
(Courtesy of Eulitha and
Paul Scherrer Institute)
75 nm and 100 nm
squares imprinted
in mr-I 7030R
75 nm and 100 nm
lines imprinted
in mr-I 8030R,
varying pitch
print
version ››› 
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