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micro resist technology GmbH
Produkt-Highlights 2010:
OrmoPrime08
New improved adhesion promoter for inorganic-organic hybrid polymers
micro resist technology GmbH provides inorganic-organic hybrid polymers (ORMOCER®s) for micro-optic and photonic applications. In order to ensure good adhesion of the hybrid polymers to substrates such as glass, quartz, silicon or plastics, the surface of the substrates has to be primed with an adhesion promoter.
To date micro resist technology GmbH has offered the three-component adhesion promoter OrmoPrime Set. It has to be mixed shortly before use and has a shelf life of 24 hours thereafter. Occasionally defects were observed in the adhesion promoting coatings. The adhesion promoter had to be removed and the treatment was repeated.
micro resist technology GmbH now offers a new improved adhesion promoter OrmoPrime08, which has been replacing the preceding OrmoPrime Set since January 2010. OrmoPrime08 is an easy-to-handle single-component product. The ready-to-use mixture can be spin coated on clean substrates. It shows defect-free film formation and has minimum six months shelf life when appropriately stored.
mr-I 7000R and mr-I 8000R
» Novel Polymers for thermal nanoimprint lithography
with strongly improved release properties «
In nanoimprint lithography (NIL) the mould release has to be defect-free and requires low release forces. The new polymer series mr-I 7000R and mr-I 8000R for thermal nanoimprinting fulfil these requirements better than other materials before. Their recipes have been developed with the focus on excellent release properties and minimum release forces.
The thermoplastic polymers mr-I 7000R and mr-I 8000R (Tg 50 °C and 105 °C) can be applied in nanoimprint processes as etch masks for the production of nanopatterns. The fields of applications are data storage, high-brightness LEDs, displays, or micro- and nano-optical elements. Their excellent nanoimprint behaviour and high plasma etch resistance particularly enable short cycle times and high pattern transfer fidelity. The improved release properties ease the structuring of challenging small structures with a resolution below 50 nm.
Both series mr-I 7000R and mr-I 8000R will be commercially available from June 2010 on.
