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micro resist technology GmbH
spezieller Photoresistsysteme mbH!
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EpoCore and EpoClad:
High-viscosity resists for preparation of polymer waveguides and for conventional pattern transfer
With its nearly vertical pattern profile the high-viscosity resist EpoCore - in combination with EpoClad with a defined lower refractive index - is excellently suited for the manufacture of highly transparent polymer based multimode waveguides with which an optical loss of 0.2 dB/ cm at 850 nm can be achieved. EpoClad with its specific composition shows an excellent adhesion to different substrate materials. Laminated embedded waveguides manufactured with EpoCore and EpoClad exhibit a high thermal stability in a wide temperature range.
The high thermal and chemical stability of the cross-linked EpoCore and EpoClad enables the application of these materials, additionally to the manufacture of permanent structures and optical components for the MEMS market, also in conventional pattern transfer processes such as electroplating.
