• Mrt2
  • Mrt3

micro resist technology develops, produces and supplies materials for microelectronic devices, semiconductor devices and MEMS products

Information regarding company holidays during Christmas vacation

Our company will be closed 22.12.2017 – 02.01.2018 and will re-open 03.01.1018.

Negative Photoresists

Our negative photoresists are used for UV-, DUV, e-beam and X-ray lithography as well as for laser direct writing ...

Positive Photoresists

Our positive photoresists are used in processes such as UV (mask aligner, laser direct writing, greyscale exposure) and e-beam lithography …

Nanoimprint Resists

Our tailor-made resist formulations are used in different technologies of nanoimprint lithography (NIL) …

Hybrid Polymers

Our UV-curable hybrid polymers are used for the manufacture of polymer-based micro- and nano-optics …

Other Products

As distributor for DOW Electronic Materials (USA), MicroChem Corp. (USA), and DuPont (USA) we complement our portfolio for Europe ...


We provide a new selection of UV-curable liquid silicone rubber / UV-PDMS (OEM:Shin-Etsu) used in replication technologies for European markets …


NIL Industrial Day 2018 – 8-9 March
In March 2018, micro resist technology will be co-hosting the 8th edition of the NIL Industrial Day symposium with its partner PROFACTOR in Vienna, Austria (March 8-9, 2018).
SPIE Photonics West – 27 January - 01 February 2018
We are pleased to announce our participation in the SPIE Photonics West Exhibition 2018 in San Francisco (USA), January 27th – February 1st 2018
Company holidays during Christmas vacation
Celebrating - resist alliance
Dear Partners and Friends, We are organizing a special event combining a “SU 8 resist - workshop” and a celebration of a long term cooperation with our American partner MicroChem Corp., MCC, at November 13th , 2017 in Munich.
SEMICON EUROPA 2017 – 14-17 November 2017
We are pleased to announce our participation in the SEMICON Europa 2017 in Munich ...
MicroTAS 2017 – 22-26 October 2017
We are pleased to announce our participation in the 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017) in Savannah (Georgia, USA)...
Beams & More Workshop 2017 – 24 October 2017
We are pleased to announce our participation in the15th Beams & More Workshop in Stuttgart (Germany), October 24th 2017...
ad3pa | International Workshop on Advanced 3D Patterning
We are pleased to announce our participation in the International Workshop on Advanced 3D Patterning in Dresden (Germany), October 5-6th 2017...
MNE2017 in Portugal - 18 - 22 September 2017
Thank you for visiting our stand at the MNE2017 Exhibition 2017 in Braga (Portugal).


micro resist technology GmbH

micro resist technology GmbH

Köpenicker Str. 325

12555 Berlin




Anfahrtsbeschreibung Innovationspark

+49 30 64 16 70 100
+49 30 64 16 70 200