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micro resist technology GmbH
The most frequently asked questions about our products:
1) Can I get nanoimprint polymer solutions for other film thicknesses?
Apart from the standard nanoimprint polymer and resist solutions
(see product listings) micro resist technology GmbH provides
solutions customised for other film thicknesses as special designs on request.
The maximum attainable film thicknesses for each series are the following.
| Nanoimprintpolymer | Maximum attainable film thickness at 3000 rpm |
|---|---|
| mr-I 7000E | 2 µm |
| mr-I 8000E | 2 µm |
| mr-I 7000R | 2 µm |
| mr-I 8000R | 2 µm |
| mr-I T85 | 25 µm |
| mr-I PMMA 35k / 75k | 3 µm |
| mr-I 9000E | 3 µm |
| mr-I 9000M | 3 µm |
| mr-NIL 6000 | 3 µm |
| mr-UVCur06 | 240 nm (same as standard) |
| mr-UVCur21 series | 1 µm |
| mr-UVCur21SF | 1.6 µm (same as standard) |
2) Does micro resist technology provide solvent thinners
for the nanoimprint products?
In the case that you want to dilute a nanoimprint polymer solution
for yourself in order to get thinner films after spin-coating, we
could provide the following solvent systems.
| Nanoimprint polymer | Thinner |
|---|---|
| mr-I 7000E | ma-T 1050 |
| mr-I 8000E | ma-T 1050 |
| mr-I 7000R | ma-T 1050 |
| mr-I 8000R | ma-T 1050 |
| mr-I T85 | No thinner available |
| mr-I PMMA 35k / 75k | ma-T 1045 |
| mr-I 9000E | ma-T 1045 |
| mr-I 9000M | ma-T 1045 |
| mr-NIL 6000 | ma-T 1045 |
| mr-UVCur06 | mr-T 1070 |
| mr-UVCur21 series | mr-T 1070 |
| mr-UVCur21SF | - |
Please keep in mind that you have to filter the diluted solutions again in order to avoid particle contamination and to guarantee a high film quality. Syringe filters work for that purpose.
3) Do you have processing guidelines for each product series?
You will get the processing guidelines with the delivery of the product.
Please contact the corresponding product manager, if you need further processing
details before.
4) Do I have to apply a release agent on my imprint mould?
We strongly recommend to apply a release agent on the imprint mould
in order to generate a high adhesion contrast between mould and substrate.
The formed anti-sticking layer (ASL) prevents defects caused by sticking
of the nanoimprint polymer on the mould. The most common release
agent for silicon
or silicon dioxide stamps is “F13-TCS” (1H,1H,2H,2H-perfluorooctyl-trichlorosilan,
CAS number [78560-45-9],available from common specialty chemicals
suppliers).
The processing of F13-TCS for Si- and SiO2 moulds is
described in: M. Beck et al., Improving Stamps for 10 nm Level Wafer
Scale Nanoimprint Lithography, Microel. Eng. 61-62 (2002), 441-448; H.
Schift et al., Controlled
co-evaporation of silanes for nanoimprint stamps, Nanotechnology 16 (2005),
S171-S175.
Methods to deposit release agents on Nickel are described in S. Park, Anti-adhesive layers on nickel stamps for nanoimprint
lithography, Microel. Eng. 73-74 (2004), 196-201; M. Keil, Process
development and characterization of antisticking layers on nickel-based
stamps designed
for nanoimprint lithography, J. Vac. Sci. Technol. B22 (2004), 3283-3287.
5) What is the difference between the products mr NIL 6000 and
mr-UVCur06 and mr-UVCur21?
mr-UVCur06 and mr-UVCur21 are UV-curable and liquid polymer systems for UV-based
nanoimprint lithography. The spin-coated liquid films are cured by UV exposure
at room temperature. There is no need for baking after the imprint step.
mr-NIL 6000 is a curing resist for thermal nanoimprint lithography,
which forms a solid film after spin coating and prebake. It exhibits
a low glass transition temperature (Tg) of about 40 °C. Thus, it can be imprinted
at temperatures as low as 80 – 100 °C. But this epoxy-based material
has to be cured by UV exposure and baking (comparable to the post exposure
bake of chemically amplified resists). Otherwise there would be a reflow of
the imprinted patterns on subsequent annealing. Curing can beneficially be
done during imprinting in the imprint tool (if the machine has an exposure
unit).
6) Do I have to use adhesion promoters on my substrates?
The use of adhesion promoters depends on the product series you want
to use.
